Pfeiffer Vacuum+Fab Solutions Presents Vacuum Technology and Gas Abatement Systems at Semicon Europa

20.10.2025

Visitors to Semicon Europa can look forward to innovative vacuum technology and gas abatement systems used in semiconductor fabs and at OEMs. They can talk to experts from Pfeiffer Vacuum+Fab Solutions about vacuum pumps, leak detectors, gas abatement systems or valves at Booth 561 in Hall B1. Here, visitors can see the highlights that Pfeiffer will present, including vacuum pumps and gas abatement systems.

Photo: CT-BW Gas abatement System.
Source: Pfeiffer Vacuum+Fab Solutions. 

Vacuum pumps for harsh semiconductor environments

The UltiDry multi-stage roots vacuum pump combines robustness with low energy requirements. Specially developed for the semiconductor industry, the UltiDry is well suited for highly demanding applications. It has been designed to handle high flow rates, harsh operating conditions, and corrosive gases – all while delivering outstanding powder management and energy efficiency.

Improved air quality with thermal gas abatement

Designed to ensure safe and environmentally friendly semiconductor processes, gas abatement systems from Pfeiffer focus on reducing harmful emissions and improving air quality within fab environments. By employing innovative technologies, these systems efficiently manage and neutralize hazardous gases and vapors generated during semiconductor manufacturing.

Interactive experience with industry experts

For a visual demonstration of where each of the different technologies from Pfeiffer are integrated in semiconductor manufacturing, a particular highlight of the Pfeiffer booth will be on display. An interactive 3D-printed model of a semiconductor fab gives visitors a realistic and tangible representation of the complete fab solutions, from cleanroom to exhaust.

Source: Busch Group